The DMEMS option lets you use your Wyko NT1100 optical
profiler to characterize micro-devices in 3D, as they
actuate, for assessment of true device functionality.
The DMEMS system captures a series of 3D measurement data,
generating a video of the sample device in motion. Template-driven
software lets you extract in-plane and out-of-plane dimensions,
resonant frequency, shape/distortion, deflection, and
other key device parameters. DMEMS is the first system
to offer both dynamic measurement and static, white light
profiling of rough surfaces and large steps-for complete
MEMS metrology on a single platform. |
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Application(Movie)
Micro Mirror
Micro Gear Chain
Micro Resonator
Micro Mirror with Defect |
